KLA TENCOR 92117-01-1伺服驅(qū)動(dòng)器 是一款高精度伺服驅(qū)動(dòng)器,用于半導(dǎo)體制造設(shè)備中的運(yùn)動(dòng)控制和精密操作。
KLA TENCOR 92117-01-1伺服驅(qū)動(dòng)器 詳情介紹:
KLA-Tencor 92117-01-1伺服驅(qū)動(dòng)器是一款高精度伺服驅(qū)動(dòng)器,用于半導(dǎo)體制造設(shè)備中的運(yùn)動(dòng)控制和精密操作。以下是該伺服驅(qū)動(dòng)器的一些詳細(xì)信息:
主要功能
- 精確運(yùn)動(dòng)控制:提供高精度的運(yùn)動(dòng)控制能力,確保設(shè)備的運(yùn)動(dòng)部件按照預(yù)設(shè)軌跡和速度運(yùn)行。
- 高響應(yīng)速度:具備快速響應(yīng)特性,適合高動(dòng)態(tài)和快速調(diào)整的應(yīng)用場(chǎng)合。
- 反饋控制:與位置傳感器和編碼器配合使用,實(shí)現(xiàn)精確的閉環(huán)控制和反饋調(diào)節(jié)。
應(yīng)用領(lǐng)域
- 半導(dǎo)體制造設(shè)備:廣泛應(yīng)用于晶圓加工、光刻、蝕刻、薄膜沉積等設(shè)備中,精確控制機(jī)械臂、掃描系統(tǒng)等部件的運(yùn)動(dòng)。
- 高精度自動(dòng)化:在需要高度精密和快速響應(yīng)的自動(dòng)化生產(chǎn)線中,用于驅(qū)動(dòng)和控制各種運(yùn)動(dòng)組件。
- 精密測(cè)試儀器:用于各種測(cè)試設(shè)備中,實(shí)現(xiàn)對(duì)樣品的精確定位和移動(dòng)。
產(chǎn)品特點(diǎn)
- 高性能:設(shè)計(jì)用于支持高帶寬、高精度的伺服控制,適應(yīng)高速和高精度的操作需求。
- 穩(wěn)定性:具有出色的穩(wěn)定性和可靠性,能夠在嚴(yán)苛的工業(yè)環(huán)境中穩(wěn)定運(yùn)行。
- 靈活配置:支持多種配置選項(xiàng),能夠與不同的傳感器和執(zhí)行器配合使用,滿足多樣化的應(yīng)用需求。
- 集成性:與KLA-Tencor的其他控制系統(tǒng)和設(shè)備緊密集成,形成高效的自動(dòng)化解決方案。
KLA TENCOR 92117-01-1伺服驅(qū)動(dòng)器 實(shí)物圖片:

english introduction:
KLA Tencor 92117-01-1 servo driver is a high-precision servo driver used for motion control and precision operations in semiconductor manufacturing equipment. Here are some detailed information about the servo drive:
major function
Precise motion control: Provides high-precision motion control capabilities to ensure that the moving parts of the equipment operate according to preset trajectories and speeds.
High response speed: With fast response characteristics, it is suitable for applications with high dynamics and quick adjustments.
Feedback control: Used in conjunction with position sensors and encoders to achieve precise closed-loop control and feedback adjustment.
application area
Semiconductor manufacturing equipment: widely used in wafer processing, photolithography, etching, thin film deposition and other equipment to precisely control the movement of components such as robotic arms and scanning systems.
High precision automation: used to drive and control various moving components in automated production lines that require high precision and fast response.
Precision testing instruments: used in various testing equipment to achieve precise positioning and movement of samples.
Product Features
High performance: designed to support high bandwidth, high-precision servo control, and adapt to high-speed and high-precision operational requirements.
Stability: It has excellent stability and reliability, and can operate stably in harsh industrial environments.
Flexible configuration: Supports multiple configuration options and can be used in conjunction with different sensors and actuators to meet diverse application needs.
Integration: Closely integrated with other control systems and equipment of KLA Tencor to form an efficient automation solution.
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