AMAT Applied Materials 0010-00557熱交換器
1.產(chǎn) 品 資 料 介 紹：
核心參數(shù)
產(chǎn)品特點(diǎn)
典型應(yīng)用
AMAT Applied Materials 0010-00557熱交換器 英文資料：
Applied Materials 0010-00557 is an efficient heat exchanger designed specifically for semiconductor manufacturing equipment, used for precise temperature control of cooling media during wafer processing to ensure process stability and equipment reliability.
Core parameters
Project specifications
Brand/Model Applied Materials 0010-00557
Scope of application: Equipment that requires precise temperature control, such as semiconductor etching, deposition, ion implantation, etc
Structural form: Plate fin or brazed plate (depending on the model)
Design pressure ≤ 2.0 MPa (some models can reach up to 3.0 MPa)
Design temperature -20~150 ℃
Material body: stainless steel/copper alloy; Sealing: High temperature resistant fluororubber
Heat transfer coefficient 2500-5000 W/(㎡· K) (depending on operating conditions)
Interface type quick connect flange or threaded connection, common sizes DN25, DN40
Cleanliness meets SEMI S2/S8 standards and is suitable for high cleanliness environments
Product Features
Efficient heat transfer: adopting a compact design, increasing the heat transfer area, improving cooling efficiency, and reducing energy consumption.
Corrosion resistance: Materials that are resistant to acid, alkali, and organic solvents are selected to adapt to strong chemical environments.
Low flow resistance: Optimize channel design, reduce pressure ｄｒｏｐ, and ensure stable circulation of the medium.
Easy to maintain: Modular structure, supports online quick replacement, reduces downtime.
Typical Applications
Pre cooling of process gases for etching machines and PVD/CVD deposition equipment
Cooling system for ion implantation machine target platform
Temperature control of lithography machine exposure optical system
Diffusion furnace carrier gas cooling
AMAT Applied Materials 0010-00557熱交換器 產(chǎn)品展示
產(chǎn)品視頻
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
