LAM 660-072826-200射頻發(fā)電機
1.產(chǎn) 品 資 料 介 紹:
中文資料:
LAM 660-072826-200射頻發(fā)電機主要應用于半導體制造和高精度工藝中,提供穩(wěn)定的射頻能量,支持等離子體生成和控制。其主要應用領域包括:
1. 半導體制造:
- 化學氣相沉積(CVD):為反應氣體提供能量,生成薄膜,應用于集成電路制造。
- 等離子體刻蝕:生成等離子體去除材料或形成微細圖案。
2. 等離子體處理:
- 等離子體清洗:去除污染物,確保材料表面的高質(zhì)量。
- 表面改性:增強材料的附著力、潤濕性等特性。
3. 微電子設備制造:
- 薄膜沉積:精確控制薄膜厚度和均勻性,應用于電子器件制造。
4. 光伏行業(yè):
- 太陽能電池制造:用于薄膜沉積和刻蝕,確保高效能量轉(zhuǎn)換。
LAM 660-072826-200通過提供高效、穩(wěn)定的射頻輸出,支持多個高精度工業(yè)和科學領域。
英文資料:
The LAM 660-072826-200 RF generator is mainly used in semiconductor manufacturing and high-precision processes, providing stable RF energy and supporting plasma generation and control. Its main application areas include:
1. Semiconductor manufacturing:
Chemical Vapor Deposition (CVD): Provides energy to reaction gases, generates thin films, and is applied in integrated circuit manufacturing.
Plasma etching: Generating plasma to remove materials or form fine patterns.
2. Plasma treatment:
Plasma cleaning: Removing pollutants to ensure high-quality material surfaces.
Surface modification: enhances the adhesion, wettability, and other properties of materials.
3. Manufacturing of microelectronic devices:
Thin film deposition: precise control of thin film thickness and uniformity, applied in electronic device manufacturing.
4. Photovoltaic industry:
Solar cell manufacturing: used for thin film deposition and etching to ensure efficient energy conversion.
LAM 660-072826-200 supports multiple high-precision industrial and scientific fields by providing efficient and stable RF output.
2.產(chǎn) 品 展 示

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