AMAT 0010-68129 驅(qū)動(dòng)器模塊
1.產(chǎn) 品 資 料 介 紹:
中文資料:
AMAT 0010-68129 是應(yīng)用材料公司(Applied Materials)生產(chǎn)的一款 射頻(RF)驅(qū)動(dòng)器模塊,通常用于其等離子刻蝕系統(tǒng)中。該模塊的主要作用是提供精確的射頻信號(hào),用于激發(fā)等離子體以進(jìn)行刻蝕、薄膜沉積等工藝,廣泛應(yīng)用于半導(dǎo)體制造行業(yè)。
主要功能:
- 射頻功率輸出:該驅(qū)動(dòng)器模塊能夠?qū)⑸漕l功率精確輸出到系統(tǒng)中的等離子體源,以確保精確的工藝控制。
- 阻抗匹配:它可以有效地匹配射頻信號(hào)的阻抗,避免能量損失,保證射頻信號(hào)的高效傳輸。
- 信號(hào)穩(wěn)定性:確保系統(tǒng)中產(chǎn)生的射頻信號(hào)穩(wěn)定可靠,避免信號(hào)干擾,從而提高整體系統(tǒng)的可靠性。
產(chǎn)品應(yīng)用領(lǐng)域:
半導(dǎo)體制造:
- 在半導(dǎo)體制造過(guò)程中,射頻驅(qū)動(dòng)器模塊應(yīng)用于等離子體刻蝕、薄膜沉積等工藝,確保刻蝕的深度、精度和一致性。這對(duì)于集成電路(IC)的生產(chǎn)至關(guān)重要,尤其是在細(xì)微結(jié)構(gòu)的制造過(guò)程中。
微電子加工:
- 在微電子加工中,AMAT 0010-68129 驅(qū)動(dòng)器模塊用于精確控制微電子元件的處理和加工,確保高精度的電氣和物理性能。
先進(jìn)材料處理:
- 除了半導(dǎo)體制造,射頻驅(qū)動(dòng)器模塊還可以用于其他先進(jìn)材料的處理,特別是在要求高精度等離子體處理的領(lǐng)域,如光電材料和納米材料的制造。
太陽(yáng)能和顯示面板生產(chǎn):
- 射頻驅(qū)動(dòng)器模塊也廣泛用于太陽(yáng)能電池和薄膜顯示面板的制造過(guò)程,幫助精確控制等離子體沉積的過(guò)程,以實(shí)現(xiàn)高效率和一致性的生產(chǎn)。
通過(guò)提供高效、穩(wěn)定的射頻功率,AMAT 0010-68129 驅(qū)動(dòng)器模塊在多個(gè)高精度制造領(lǐng)域中發(fā)揮著重要作用。
英文資料:
AMAT 0010-68129 is a radio frequency (RF) driver module produced by Applied Materials, commonly used in their plasma etching systems. The main function of this module is to provide accurate RF signals for exciting plasma for processes such as etching and thin film deposition, which are widely used in the semiconductor manufacturing industry.
Main functions:
RF power output: This driver module is capable of accurately outputting RF power to the plasma source in the system to ensure precise process control.
Impedance matching: It can effectively match the impedance of RF signals, avoid energy loss, and ensure efficient transmission of RF signals.
Signal stability: Ensure the stability and reliability of the RF signals generated in the system, avoid signal interference, and thus improve the overall reliability of the system.
Product application areas:
Semiconductor manufacturing:
In the semiconductor manufacturing process, RF driver modules are applied in processes such as plasma etching and thin film deposition to ensure the depth, accuracy, and consistency of etching. This is crucial for the production of integrated circuits (ICs), especially in the manufacturing process of fine structures.
Microelectronics processing:
In microelectronic processing, the AMAT 0010-68129 driver module is used to precisely control the processing and fabrication of microelectronic components, ensuring high-precision electrical and physical performance.
Advanced Material Processing:
In addition to semiconductor manufacturing, RF driver modules can also be used for processing other advanced materials, especially in fields that require high-precision plasma processing, such as the manufacturing of optoelectronic materials and nanomaterials.
Production of solar energy and display panels:
RF driver modules are also widely used in the manufacturing process of solar cells and thin film display panels, helping to precisely control the plasma deposition process to achieve high efficiency and consistency in production.
The AMAT 0010-68129 driver module plays an important role in multiple high-precision manufacturing fields by providing efficient and stable RF power.
2.產(chǎn) 品 展 示

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| CGC 400 | CACR-SR1B-E | 61-0532-34 |
| CGC 200 | CACR-SR03BE12M-E | RMS420-C610-03 |
| CA950-IO | SERVOSTAR-601 | IMSEM11 |




